发明名称 METHOD AND APPARATUS FOR INSPECTING RETICLES IMPLEMENTING PARALLEL PROCESSING
摘要 Disclosed is an apparatus for analyzing a plurality of image portions of at least a region of a sample. The apparatus includes a plurality of processors arranged to receive and analyze at least one of the image portions, and the processors being arranged to operate in parallel. The apparatus also includes a data distribution system arranged to receive image data, select at least a first processor for receiving a first image from the image data, select at least a second processor for receiving a second image from the image data, and output the first and second image portions to their selected processors.
申请公布号 US2006269119(A1) 申请公布日期 2006.11.30
申请号 US20060462644 申请日期 2006.08.04
申请人 KLA-TENCOR 发明人 GOLDBERG EDWARD M.;JOHNSON ERIK N.;MILLER LAWRENCE R.
分类号 G01N21/956;G06K9/00;G03F1/08;G06T1/00;G06T1/20;G06T7/00 主分类号 G01N21/956
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