| 摘要 |
A modularly constructed electrical component having a module substrate, preferably, of Si, and having one or more preferably un-housed chips placed on the module substrate while being electrically connected thereto and each joined to the module substrate, e.g., by direct wafer bonding. A recess is provided in the module substrate so that a closed hollow space is formed when the chip is joined to the module substrate. The hollow space is not formed by a protective cap, which surrounds the chip and, with the module substrate, closes it on all sides. Rather it is formed by the joining of opposing contact areas of the chip underside and of the upper side of the module substrate. The component can be economically produced because it does not require a protective cap for creating the hollow space. The component has a higher yield than monolithic integration of the functional units.
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