| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for inspecting a solid state imaging apparatus reflecting view impression to image inspection. SOLUTION: A smooth image is prepared from an original image obtained from the solid state imaging apparatus driven in a dark imaging state and the smooth image is subtracted from the original image to prepare a point defect image. Then respective pixel outputs in the point defect image are measured, the output values are distributed in accordance with previously determined classes, and the output values are accumulatively counted in each class to prepare the frequency distribution of pixel outputs. Then a transformation frequency gi is found out from a frequency fi by a non-linear function and a total transformation frequency N' is calculated from the transformation frequency gi. A transformation mean valueμ' is calculated from a representative value xi of a class, the transformation frequency gi and the total transformation frequency N', and the representative value xi of the class, the transformation frequency gi, the total transformation frequency N', and the transformation mean valueμ' are substituted for a standard deviation calculation expression to calculate a transformation standard deviationσ'. The calculated transformation standard deviationσ' is compared with a reference value to judge the quality of the transformation standard deviationσ'. COPYRIGHT: (C)2007,JPO&INPIT |
