| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas-levitated carrying apparatus which can so carry a plate-form carried body without increasing the flow rate of its jetting gas as to give no damage to the plate-form carried body. SOLUTION: In the gas-levitated carrying apparatus, there are disposed sequentially a plurality of air-levitated units 3 each of which so jets air from its carrying surface 4 to a flat-plate substrate 2 as to levitate the flat-plate substrate 2. Further, the flat-plate substrate 2 is received at a receiving end 4B formed at the back end present in the carrying direction of the carrying surfaces 4 of the air-levitated units 3. Moreover, the flat-plate substrate 2 is carried successively in a non-contacting state with the carrying surfaces 4, while delivering the substrate 2 from a delivering end 4A formed at the front end present in the carrying direction of the carrying surfaces 4. Hereupon, the delivering end 4A of the air-levitated unit 3 disposed backward in the carrying direction, which is one of the two air-levitated units 3 so disposed along the carrying direction that they are adjacent to each other, is positioned more highly than the receiving end 4B of the other of the two air-levitated units 3. COPYRIGHT: (C)2007,JPO&INPIT
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