| 摘要 |
PROBLEM TO BE SOLVED: To reduce the number of manufacturing processes for a magnetic disk having an isolation trench and a concave pit shallower than this on a magnetic surface. SOLUTION: An isolation trench 19, formed between data areas, and a shallow concave pit 23, for recording control information, are formed in a resist layer 63 on the disk substrate by pressing force by a stamper 37. Furthermore, it is etched to form the isolation trench 19, following a concavo-convex pattern by the resist layer 63, and the concave pit 23 at the same time. A master for the stamper 37 forms a positive type photoresist layer on the substrate, exposes a formation part of a land part to this, develops making the formation part of the isolation trench as a non-exposing part and making the formation part of the concave pit as a weak exposure part, removes the photoresist layer of the land part formation part, and forms the concavo-convex photoresist pattern in which a part of thickness for the weak exposure part of the concave pit formation part is made to remain and the formation part of the isolation trench 19 is made to almost remain. COPYRIGHT: (C)2007,JPO&INPIT
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