| 摘要 |
PROBLEM TO BE SOLVED: To provide an acquisition method for a drive controlling correction data for a mobile body for smoothly and precisely moving the mobile body moved by two drive shafts. SOLUTION: On a single mobile body 13 fed linearly by a first drive means and a second drive means individually arranged in parallel to a guide rail 12, positioning accuracy of the mobile body 13 is measured by a first measurement axis M1 set in the vicinity of the first drive means and a second measurement axis M2 set in the vicinity of the second drive means. From the positioning accuracy measurement data measured by the first measurement axis M1, drive controlling correction data for the first drive means are calculated, while drive control correction data for the second drive means are calculated from the positioning accuracy measurement data measured by the second measurement axis M2. COPYRIGHT: (C)2007,JPO&INPIT
|
