| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas pipe having a shorter construction period for supplying high-purity material gas, and to provide a gas pipe distributing method using the same. SOLUTION: The gas pipe comprises a body having a hollow portion and closing means installed at both ends of the body for closing opening portions at both ends of the body. The body is previously baked, and the opening portions are closed by the closing means after baking. The gas pipe distributing method uses the same. COPYRIGHT: (C)2007,JPO&INPIT
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