| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent a surface of an article to be treated from fouling due to reentrainment, by expanding the surface area of a non-metal member and enabling easy deposition of fine particles produced by a glow discharge treatment. <P>SOLUTION: A coating film is directly formed on the surface of the non-metal member through a spraying method using oxide ceramics, and a rough surface characteristic of a sprayed coating is utilized to deposit a large amount of fine particles produced by the glow discharge phenomenon and to prevent its reentrainment. By forming a chromatically colored oxide ceramic coating film, a heat source such as a quartz heater and a quartz lamp can emit a large amount of infrared radiation and achieves an improved efficiency. By using a spraying method using a porous metal plate, the surface area of the coating film can be expanded to improve the quality of a semiconductor product. <P>COPYRIGHT: (C)2007,JPO&INPIT |
