| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity type MEMS actuator, individually controlling the oscillating frequency and mechanical resonance frequency of an oscillating member using only one pair of electrodes. SOLUTION: This MEMS actuator 100 includes: an MEMS device 1 having an oscillating member oscillatably supported on a base plate and a pair of electrodes for driving the oscillating member utilizing the electrostatic force; and a power supply circuit 2 for applying voltage between the paired electrodes provided on the MEMS device 1. The power supply circuit 2 applies the a.c. voltage where d.c. bias voltage is superposed and varies the superposed d.c. bias voltage. COPYRIGHT: (C)2007,JPO&INPIT
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