| 摘要 |
PROBLEM TO BE SOLVED: To make a gas transfer rate fast in a gas exchange membrane for a gas exchange chip for removing a gas component such as oxygen and carbon dioxide gases from a liquid and transferring it to gas and other liquids, a gas permeation filter suitable for use in such the gas exchange chip and a total organic carbon measuring device using such the gas exchange chip. SOLUTION: In a preferred embodiment, to form a gap through which only the gas component included in the liquid can be transferred without transferring the liquid through the hole of a membrane filter, a fluorocarbon layer is filmed on both sides of the membrane filter as gas permeation layers. The gas permeation layers are formed by plasma treatment serving CHF<SB>3</SB>as a reaction gas. COPYRIGHT: (C)2007,JPO&INPIT
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