发明名称 |
Patterned functionalized silicon surfaces |
摘要 |
The present invention provides a method for preparing a silicon substrate and a silicon substrate having a silicon surface comprising a pattern of covalently bound monolayers. Each of the monolayers comprises an alkyne, wherein at least a portion of each monolayer is no more than about 5 molecules of the alkyne wide.
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申请公布号 |
US2006270101(A1) |
申请公布日期 |
2006.11.30 |
申请号 |
US20060499188 |
申请日期 |
2006.08.04 |
申请人 |
BURIAK JILLIAN M;HURLEY PATRICK T |
发明人 |
BURIAK JILLIAN M.;HURLEY PATRICK T. |
分类号 |
H01L29/08;G01Q10/04;H01L21/306;H01L21/469;H01L51/40 |
主分类号 |
H01L29/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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