DEVICE FOR PROTECTION PIPE FROST OF SEMICONDUCTOR MANUFACTURING EQUIPMENTS

摘要

An apparatus for preventing pipe frost of semiconductor manufacture equipment is provided to prevent damage of the semiconductor manufacture equipment by using a dry air supplying pipe. A dry air supplying pipe(110) is installed along a piping(20) in a row. An injecting hole is formed on the dry air supplying pipe. The injecting hole injects dry air to a portion where frost or freezing is to be generated by covering the piping. A dry air supplying apparatus(120) is installed on an end of the dry air supplying pipe to supply dry air thereinto. A controller(130) is connected to the dry air supplying apparatus. The controller controls the dry air supplying apparatus and generates an alarm when an abnormal state is occurred. A liquid leakage detecting unit(140) is installed on a lower portion of the dry air supplying pipe. The liquid leakage detecting unit is connected to the controller to transmit a liquid leakage detecting signal thereto.