| 发明名称 |
Combined spatial filter and relay systems |
| 摘要 |
Low aberration relay systems modified to perform as spatial filters in reflectometer, spectrophotometer, ellipsometer, polarimeter and the like systems.
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| 申请公布号 |
US2006268271(A1) |
申请公布日期 |
2006.11.30 |
| 申请号 |
US20050085450 |
申请日期 |
2005.03.22 |
| 申请人 |
LIPHARDT MARTIN M;HE PING |
发明人 |
LIPHARDT MARTIN M.;HE PING |
| 分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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