发明名称 Imprint lithography template having a coating to reflect and/or absorb actinic energy
摘要 The present invention is directed towards a template, transmissive to energy having a predetermined wavelength, having first and second opposed sides and features a coating disposed thereon to limit the volume of the template through which the energy may propagate. In a first embodiment, the template includes, inter alia, a mold, having a plurality of protrusions and recessions, positioned on a first region of the first side; and a coating positioned upon a second region of the first side, with the coating having properties to block the energy from propagating between the first and second opposed sides.
申请公布号 US2006266916(A1) 申请公布日期 2006.11.30
申请号 US20050136897 申请日期 2005.05.25
申请人 MOLECULAR IMPRINTS, INC. 发明人 MILLER MICHAEL N.;FLETCHER EDWARD B.;STACEY NICHOLAS A.;WATTS MICHAEL P.C.;MCMACKIN IAN M.
分类号 B29C35/12 主分类号 B29C35/12
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