| 摘要 |
A module, such as a pump module or a sputtering module, comprises a lid assembly sufficient to fit or to cover a compartment, such as a pump compartment or a sputtering compartment, of a coating system, such as a modular coating system. A sputtering module comprises a power supply unit and is sufficient for receiving an electrical input and for delivering an electric output sufficient for sputtering in a sputtering compartment. A pump module, it comprises at least one pump and is sufficient for receiving an electrical input sufficient for operating the pump or pumps. Various connections between the module, external supplies, components or devices, and the compartment may be made automatically and/or manually. A control connection may be such that an external controller or a central controller is able to recognize a particular module that is associated with a particular compartment of the coating system. |
