| 摘要 |
PROBLEM TO BE SOLVED: To lengthen the life of a pressure sensor for fluids by improving its resistance to chemicals. SOLUTION: The pressure sensor 1 is provided with a thin disk-like diaphragm 13; a laser displacement meter 14 for detecting the amount of deformation of the diaphragm 13; and an operation part 19 connected to the laser displacement meter 14. In the pressure sensor 1, the amount of deformation of the diaphragm 13 due to the pressure of a fluid which has flowed in is detected by the laser displacement meter 14 to determine the pressure of the fluid on the basis of both the amount of deformation and conversion information 191a previously stored in the operation part 19. The diaphragm 13 of the pressure sensor 1 is made of black lead (or a silicon substrate) as a base material, and a coating of silicon carbide is formed in its surface in contact with the fluid. It is thereby possible to improve resistance to chemicals and lengthen the life of the pressure sensor 1 while preventing metal elution. COPYRIGHT: (C)2007,JPO&INPIT
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