发明名称 METHOD OF PACKAGING SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a method of packaging a semiconductor chip capable of omitting a process for inspecting the gap between the semiconductor chip and a circuit board after packaging the semiconductor chip, and capable of reducing working hours. SOLUTION: In the method for packaging the semiconductor chip, the semiconductor chip is arranged on the circuit board, heat treatment is performed while a load is applied to the semiconductor chip by a packaging nozzle, and then the packaging nozzle is moved so that the gap between the semiconductor chip and the circuit board is reduced. In the packaging method, it is determined whether the value of the load applied to the semiconductor chip is a prescribed load value or smaller for determining quality in the packaging of the semiconductor chip. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006324289(A) 申请公布日期 2006.11.30
申请号 JP20050143566 申请日期 2005.05.17
申请人 SONY CORP 发明人 IWABUCHI TOSHIAKI
分类号 H01L21/60 主分类号 H01L21/60
代理机构 代理人
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