发明名称 Process for producing transparent electrode
摘要 To provide a process for producing a transparent electrode comprising a tin oxide film which can readily be patterned, which can be realized at a low cost, and which has low resistivity and is excellent in transparency. A process for producing a transparent electrode having a patterned tin oxide film formed on a substrate, which comprises a step of forming a tin oxide film having light absorption characteristics on a substrate, a patterning step of removing part of the tin oxide film having light absorption characteristics, and a step of subjecting the patterned tin oxide film having light absorption characteristics to heat treatment to obtain a tin oxide film.
申请公布号 US2006270209(A1) 申请公布日期 2006.11.30
申请号 US20060500896 申请日期 2006.08.09
申请人 ASAHI GLASS COMPANY, LIMITED 发明人 MITSUI AKIRA;ODAKA HIDEFUMI;YONEMORI SHIGEAKI;AKAO YASUHIKO
分类号 H01L21/44;C03C17/245;G02F1/1343;H01B5/14;H01B13/00;H01J9/02;H01L31/18 主分类号 H01L21/44
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