ENERGY BEAM IRRADIATOR AND IRRADIATING METHOD

摘要

[PROBLEMS] To provide an energy beam irradiator suitable for enhancing the processing capability of an apparatus and reducing gas consumption and installation space of the apparatus, and to provide an irradiating method. [MEANS FOR SOLVING PROBLEMS] When a protective sheet T stuck to a wafer W while having UV-curing adhesive A is stripped by irradiating the adhesive A of the protective sheet T with UV-rays thereby lowering its bonding force, the wafer W with the protective sheet T is suction held by a supporting member (3) and irradiated with UV-rays from a UV lamp (2) while being held. At that time, nitrogen gas N is jetted from a gas ejection region GA adjacent to the wafer suction holding region SA of the supporting member (3).