DATA OUTPUT DEVICE, DATA OUTPUT METHOD, PATTERN DRAWING DEVICE AND PATTERN DRAWING METHOD IN PATTERN DRAWING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a pattern drawing system by which decline in throughput in the pattern drawing process can be suppressed even if number of light modulation devices is increased.

SOLUTION: The pattern drawing system has a pattern drawing device 40 which draws pattern on an object 2 by using an optical modulator 5 including several light modulation devices whose modulation state can be selectively set respectively, and a data output device 30 which outputs data for setting the modulation state of the light modulation devices to the pattern drawing device 40. The data output device 30 has a data creating means 32 for creating data which does not include addresses for designating individual light modulation devices out of the several light modulation devices corresponding to a first modulation state, and includes addresses for designating individual light modulation devices corresponding to a second modulation state, according to data showing patterns to be drawn and a transmission means 33 which transmits data created by the data creating means 32 to the pattern drawing device 40.

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