| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for pickup of a chip for stabilized pickup operation of a chip to prevent pickup error by preventing variation in effects of facilitating taking out chips from a sheet. SOLUTION: In picking up of a chip 6 which is pasted to a sheet 5 using an adhesive layer 5a having such property as generates gas under radiation of ultraviolet ray, the intensity of ultraviolet ray radiated from a UV source 8b for forming a gas layer G at the interface between the chip 6 and the sheet 5 is measured with an ultraviolet ray sensor 14a. Based on the measuring result, a light radiation control unit controls the UV source 8b. Thus, variation in intensity of ultraviolet ray radiated to the sheet 5 is prevented to stabilize a pickup auxiliary effect that facilitates taking out of the chip 6. COPYRIGHT: (C)2007,JPO&INPIT |
