| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate-holding device which can give uniform chucking force to each of a plurality of substrates that are made of an insulating material. SOLUTION: The substrate holding device 11 is provided with a stage 12 for holding a substrate W and a holding member 13 for pressing against the upper periphery of the substrate W to the upper surface of a stage 12. The stage 12 is provided with an electrostatic chucking mechanism 16 for attracting the holding member 13 to the upper surface of the stage 12. The holding member 13 is sucked to the nearly entire area of the upper surface of the stage 12 by the electrostatic chucking mechanism 16. Accordingly, the respective substrates W can be held on the stage 12 with a uniform chucking force. COPYRIGHT: (C)2007,JPO&INPIT |
