METHOD OF MANUFACTURING COLD-CATHODE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a cold-cathode element capable of restraining unevenness of electron emitting characteristics.

SOLUTION: The method of manufacturing the cold-cathode element comprises a process of imparting a surface of a fluorinated photoresist layer 16 with a hydrophylic property by dissolving or removing the surface thereof by a prescribed size, and a process of weakening a water repellent property generated on the surface of the photoresist layer 16 by immersing the photoresist layer in etching solution in which a surfactant is added. The etching solution is made easy to penetrate into holes formed on an insulation layer 13 when applying wet etching.

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