发明名称 GRATING SPECTROMETER SYSTEM AND METHOD FOR THE ACQUISITION OF MEASURED VALUES
摘要 The present invention is directed to a grating spectrometer system for polychromator spectrometer arrangements and monochromator spectrometer arrangements. The grating spectrometer system, according to the invention, comprises a light source for illuminating the sample to be analyzed, a diffraction grating, imaging optical elements, a detector arranged in the image plane, and a controlling and regulating unit. Individual light sources, preferably LEDs having different spectral characteristics, whose spectral range covers a plurality of diffraction orders in the image plane are used as light source. Only those LEDs which do not illuminate the same location of the individual detectors arranged in the image plane in any diffraction order are switched on individually or in groups by the controlling and regulating unit. The proposed solution is suitable for polychromator spectrometer arrangements and for monocluomator spectrometer arrangements. The field of application is determined by the spectral sensitivity of the detector that is employed. By using a plurality of diffraction orders, the resolution can be increased with the detector size remaining the same, or the detector surface can be reduced while retaining the same imaging quality.
申请公布号 US2006268270(A1) 申请公布日期 2006.11.30
申请号 US20060382584 申请日期 2006.05.10
申请人 CARL ZEISS MICROLMAGING GMBH 发明人 KERSTAN FELIX;CORRENS NICO
分类号 G01J3/28 主分类号 G01J3/28
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