APPARATUS FOR THE GENERATION OF PARALLEL BEAMLETS

摘要

The invention relates to an apparatus for the generation of parallel beamlets, comprising a source for particles or radiation, a collimator and, placed between the source and the collimator, a beam splitter for dividing the beam from the source into beamlets, wherein a first macrolens is provided between the source and the beam splitter for forming a substantially parallel beam of rays or beam of particles, and in that between the beam splitter and the collimator, immediately after the beam splitter, a second macro- lens is provided.