| 摘要 |
<p>A reticle mask blade assembly of an exposing apparatus and an operating method using the same are provided to prevent a mis-operation of a stepping motor by using an encoder for measuring an absolute size of an illumination region defined by a reticle mask blade. A reticle mask blade assembly(700) is comprised of a body(400) and a reticle mask blade(500) at a center thereof. The reticle mask blade includes four blades(502,504,506,508). Corner portions of the blades are superposed. The blades are connected to a stepping that is coupled to an encoder. The blades are moved to a predetermined direction by the stepping motor. According to the movement of the blades, an illumination region(510) is defined. The illumination region has a rectangular shape and positioned at a center portion of the body.</p> |
