发明名称 |
Grating spectrometer system and method for measurement recording |
摘要 |
The system has a light source for lighting a sample (6) to be tested, where the source has individual light sources of different spectral characteristics. The spectral zone of the sources overcoats several diffraction orders in an image level. A control and regulating unit (8) switches the light sources individually or in groups, which do not light the same position of detectors arranged in the image level, in any of the arrangements. An independent claim is also included for a method for performing measurement value logging. |
申请公布号 |
EP1726930(A1) |
申请公布日期 |
2006.11.29 |
申请号 |
EP20060006507 |
申请日期 |
2006.03.29 |
申请人 |
CARL-ZEISS JENA GMBH |
发明人 |
KERSTAN, FELIX;CORRENS, NICO |
分类号 |
G01J3/10;G01J3/18;G01J3/32;G01J3/36 |
主分类号 |
G01J3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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