发明名称 Grating spectrometer system and method for measurement recording
摘要 The system has a light source for lighting a sample (6) to be tested, where the source has individual light sources of different spectral characteristics. The spectral zone of the sources overcoats several diffraction orders in an image level. A control and regulating unit (8) switches the light sources individually or in groups, which do not light the same position of detectors arranged in the image level, in any of the arrangements. An independent claim is also included for a method for performing measurement value logging.
申请公布号 EP1726930(A1) 申请公布日期 2006.11.29
申请号 EP20060006507 申请日期 2006.03.29
申请人 CARL-ZEISS JENA GMBH 发明人 KERSTAN, FELIX;CORRENS, NICO
分类号 G01J3/10;G01J3/18;G01J3/32;G01J3/36 主分类号 G01J3/10
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