NEGATIVE RESIST COMPOSITION

摘要

The negative resist composition of the present invention comprises a silsesguioxane resin (A) comprising a constituent unit (a1) represented by the following general formula (I) and a constituent unit (a2) represented by the following general formula (II), an acid generator component (B) which generates an acid upon exposure, and a crosslinking agent component (C):
wherein R 1 represents a linear or branched alkylene group having to 5 carbon atoms, and