| 摘要 |
A wire for a display device, a thin film transistor substrate comprising the wire, and a method for manufacturing the thin film transistor substrate are provided to improve reliability of the wire, by forming the wire of a lower layer having excellent adhesive characteristic, a middle layer having a low electric resistance, and an upper layer having a corrosion resistance. A wire for a gate line(121), a data line(171), or a drain electrode(175) comprises a lower layer, a middle layer, and an upper layer. The middle layer includes silver. The lower layer includes any one of nickel, nickel nitride, molybdenum nitride, chromium nitride, tantalum nitride, and titanium nitride. The upper layer includes any one of nickel, nickel nitride, molybdenum nitride, chromium nitride, tantalum nitride, titanium nitride, an indium oxide based material containing indium of 50 at% or more, and a zinc oxide based material containing zinc of 50 at% or more. |
