CATALYTIC ENHANCED CHEMICAL VAPOR DEPOSITION APPARATUS HAVING EFFECTIVE FILAMENT OF ARRANGEMENT STRUCTURE

摘要

A catalytic enhanced chemical vapor deposition apparatus having an effective filament of an arrangement structure is provided to obtain a uniform thin film by effectively arranging W filaments of the catalytic enhanced chemical vapor deposition apparatus. A catalytic enhanced chemical vapor deposition apparatus having an effective filament of an arrangement structure includes at least two electrodes(160), a plurality of gas nozzles(140), and a shower head(130) composed of at least one filament(150). The filament(150) has a symmetric structure in right and left sides with respect to a central portion of the shower head(130).