DEVICE FOR CONNECTING TWO PIPES AND APPARATUS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE USING THE SAME

摘要

A pipeline connecting member and a semiconductor substrate processing apparatus with the same are provided to check easily an inner state of a vacuum line without degradation of inner conditions of the vacuum line by using inlet/outlet holes of a measurement unit. A pipeline connecting member includes a centering body and a sealing unit. The centering body is arranged between two pipelines(121) in order to connect the two pipelines with each other. The centering body includes inlet/outlet holes of a measurement unit(160). The sealing unit is arranged at both sides of the centering body in order to seal a predetermined portion between the two pipelines and the centering body.