| 摘要 |
Three axes that are orthogonal to each other at one point are taken as an X-axis, a Y-axis and a Z-axis. An irradiation angle setting motor (14a) holds a holder (4), and sets an irradiation angle r of an ion beam (58) by rotating this holder (4) around a center axis (60) that is parallel to the X-axis. A Y-axis linear motor (20) causes the holder (4) and the irradiation angle setting motor (14a) to ascend and descent in the direction of the Y-axis. A Z-axis linear motor (30) moves the holder (4), the irradiation angle setting motor (14a) and the Y-axis linear motor (20) in the direction of the Z-axis. A control unit (40) operation-controls synchronously the Y-axis linear motor (20) and the Z-axis linear motor (30) so that a substrate holding surface (6) of the holder (4) reciprocates and scans linearly along an S-axis that is parallel to the substrate holding surface (6) and orthogonal to the X-axis. A further embodiment shows the positions of the Y-axis and Z-axis linear motors swapped. |
