BATCH TYPE GAP BALL TOOL AND OPERATION METHOD THEREOF

摘要

A batch type gap ball tool and an operation method thereof are provided to obtain a standardization method and suppress mistakes of a user by checking and adjusting a gap between electrodes. A plurality of parallel gap checking balls(100) are loaded on four edges above a lower electrode(110) in an inside of a chamber. A center ball(102) is loaded on a center of the four parallel gap checking balls above the lower electrode in the inside of the chamber. A plurality of coupling lines are used to integrate the parallel gap checking balls and the center ball. The coupling lines include a first coupling line(104) for connecting the parallel gap checking balls in a rectangular state and a second coupling line(106) for connecting two parallel gap checking balls with the center ball.