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发明名称
Method to remove spacer after salicidation to enhance contact etch stop liner stress on mos
摘要
申请公布号
SG126827(A1)
申请公布日期
2006.11.29
申请号
SG20060001451
申请日期
2006.03.06
申请人
CHARTERED SEMICONDUCTOR MANUFACTURING LTD.
发明人
WAY TEH YOUNG;MENG LEE YONG;WOH LAI CHUNG;WENHE LIN;YONG LIM KHEE;LENG TAN WEE;SUDIJONO JOHN;PENG KOH HUI;CHOO HSIA LING
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