| 摘要 |
A single thin plate storage container and a shock-absorbing support member used therein are provided to stably and exactly support a thin silicon wafer and easily take out of and put in the thin silicon wafer out. A vessel body receives one thin plate therein, which is easily bent. A cover(3) is attached to the vessel body. A lower support member(35) is positioned at a vessel body side, and supports the thin plate from a lower side with a surface. A surface support member is positioned at the cover side, and supports the thin plate from an upper surface with surface, line or point. When the cover is closed, the lower support member contacts and supports with the thin plate at the lower side. The surface support member contacts and supports the thin plate at the upper surface.
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