发明名称 PROCESS FOR DECOMPOSING FLUORINE COMPOUNDS
摘要 A fluorine compound having iodine within the molecule is decomposed by a decomposition reactive agent comprising alumina and an alkaline earth metal compound, the produced chlorine, fluorine and/or sulfur are fixed as a chloride, a fluoride and/or a sulfate of alkaline earth metal in the reactive agent, and iodine, which cannot be fixed as a salt of alkaline earth metal, is removed by an adsorbent.
申请公布号 EP1587604(B1) 申请公布日期 2006.11.29
申请号 EP20040703489 申请日期 2004.01.20
申请人 SHOWA DENKO K.K. 发明人 OKA, MASAKAZU
分类号 B01D53/68;B01D53/70;H01L21/3065 主分类号 B01D53/68
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