| 发明名称 |
MEMBER EXCHANGER, METHOD OF CONTROLLING MEMBER EXCHANGER, IC INSPECTION METHOD, IC HANDLER, AND IC INSPECTOR |
| 摘要 |
<p>A configuration having two drive shafts, a drive system 4 connected to one end of each drive shaft for rotationally driving the respective drive shaft, and a holding and transfer mechanism 5, 6 connected to the other end and having a holding device 5 a , 6 a for holding an IC, each holding and transfer mechanism 5, 6 being able to operate independently.</p> |
| 申请公布号 |
EP1286168(B1) |
申请公布日期 |
2006.11.29 |
| 申请号 |
EP20020711273 |
申请日期 |
2002.01.31 |
| 申请人 |
SEIKO EPSON CORPORATION |
发明人 |
FUJIMORI, HIROAKI;MAEDA, MASAMI |
| 分类号 |
G01R31/26;B23Q7/04;B23Q7/14;G01R31/28;H01L21/66 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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