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发明名称
APPARATUS FOR INDICATING VENTILATION STATE IN A SEMICONDUCTOR MANUFACTURING EQUIPMENT
摘要
申请公布号
KR100652296(B1)
申请公布日期
2006.11.29
申请号
KR20000083581
申请日期
2000.12.28
申请人
发明人
分类号
H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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