THERMAL PROCESSING EQUIPMENT AND DRIVING METHOD THEREOF

摘要

Thermal processing equipment is provided to seal the opening of a flange by controlling the speed of a motor according to the adhesion pressure of a sealing unit. An opening is formed on one surface of a process tube(110). The opening is opened/shut by a sealing unit(150). A pressure sensor(170) measures the adhesion pressure between the sealing unit and the one surface of the process tube. The sealing unit includes a tub cap closely attached to the one surface of the process tube and a cap base for elastically supporting the tube cap.