| 发明名称 |
Computer-implemented method and carrier medium configured to generate a set of process parameters and/or a list of potential causes of deviations for a lithography process |
| 摘要 |
A computer-implemented method and a storage medium adapted to identify potential causes of lithography process failure or drift is provided.
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| 申请公布号 |
US7142941(B2) |
申请公布日期 |
2006.11.28 |
| 申请号 |
US20050246761 |
申请日期 |
2005.10.07 |
| 申请人 |
KLA-TENCOR TECHNOLOGIES CORP. |
发明人 |
MACK CHRIS;JONES ROBERT;BYERS JEFFREY |
| 分类号 |
G06F19/00;G03F7/20;G05B13/02;G06G7/48 |
主分类号 |
G06F19/00 |
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