| 摘要 |
A semiconductor wafer supporter is provided to prevent the contamination of a semiconductor wafer and to restrain the warpage of the wafer by spacing the wafer apart from a stage using a gas supply unit and a plurality of fixing pins. A semiconductor wafer supporter includes a stage, a gas supply unit and a plurality of fixing pins. The stage(100) is used for loading stably a semiconductor wafer. The stage has a plurality of first holes. The gas supply unit(130) supplies predetermined gas into an upper space between the stage and the wafer through the first holes of the stage in order to space the wafer apart from the stage. The plurality of fixing pins(120) are arranged along a peripheral portion of the stage in order to fix an edge portion of the wafer.
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