| 发明名称 |
Apparatus and method for inspecting and cleaning semiconductor devices |
| 摘要 |
A semiconductor device is inspected and cleaned by applying a vacuum to the area in which the semiconductor device is positioned. Micro-sized particulates that are brushed off the semiconductor device during cleaning are drawn off by the vacuum.
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| 申请公布号 |
US7140066(B1) |
申请公布日期 |
2006.11.28 |
| 申请号 |
US20030404342 |
申请日期 |
2003.04.01 |
| 申请人 |
ITT MANUFACTURING ENTERPRISES, INC. |
发明人 |
MURRAY TIMOTHY GRAY;MAASS BRUCE ALAN |
| 分类号 |
A47L5/38 |
主分类号 |
A47L5/38 |
| 代理机构 |
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