| 摘要 |
A cooling unit of semiconductor diffusion equipment is provided to prevent a breakdown of a wafer and a process accident by sensing a loading state of the wafer in a real-time period. A cooling unit of semiconductor diffusion equipment includes a cooling chamber(210), a loading part(230) installed within the cooling chamber to load a wafer thereon, a refrigerant supply line(120) connected with the cooling chamber to supply a refrigerant to the cooling chamber, and a horizontal sensing part installed at the cooling chamber to sense a horizontal state of the wafer. The horizontal sensing unit includes a sensor(300) for sensing the horizontal state of the wafer and a control part for controlling a process according to an electrical signal received from the sensor.
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