| 摘要 |
A vertical type multi-substrate processing system and a processing method thereof are provided to minimize a transfer space by transferring vertically substrates using a predetermined table. A vertical type multi-substrate processing system includes a cassette, a table, a transfer track, a plurality of loadlock chambers, and process chambers. The cassette is used for storing horizontally a plurality of substrates. The table(120) is used for keeping the substrates in a vertical state. The transfer track is used for moving the table to and fro. The plurality of loadlock chambers are arranged parallel with each other along the transfer track in order to receive the vertical state substrates from the cassette. The process chambers are connected to rear ends of the loadlock chambers in order to perform a predetermined process on the substrates in the vertical state.
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