发明名称 Method of forming a transistor with a bottom gate
摘要 A transistor having a bottom gate formed from a layer of gate material and a channel region formed from a layer semiconductor material. In some examples, the layer of gate material is patterned separately from the layer of semiconductor material. In some examples the patterning of the layer of gate material also leaves other conductive structures that may be, in some examples, used to provide a bottom gate bias voltage to the bottom gate. In some examples, the layer of semiconductor material is formed by bonding two wafers together with a substrate of one of the wafers being cleaved, wherein a remaining portion of the semiconductor substrate is a semiconductor layer from which the channel region is formed.
申请公布号 US7141476(B2) 申请公布日期 2006.11.28
申请号 US20040871402 申请日期 2004.06.18
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 DAO THUY B.
分类号 H01L21/336;H01L21/00;H01L21/84;H01L29/786 主分类号 H01L21/336
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