A Detection device for pattern defects,申请号KR20050025481-传众专利搜索

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发明名称	A Detection device for pattern defects
摘要
申请公布号	KR100649539(B1)	申请公布日期	2006.11.27
申请号	KR20050025481	申请日期	2005.03.28
申请人		发明人
分类号	H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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