发明名称 INTERFERENCE SPECTROSCOPY MEASUREMENT IN DISTURBANCE ENVIRONMENT
摘要 PROBLEM TO BE SOLVED: To warrant that a recording head floats at a proper height by controlling a slider manufacturing process, by enabling accurate measurement between the head and a rotating disc. SOLUTION: An interference spectroscopy measuring method in a disturbance state environment is described. The disturbance state environment 106 includes one or more fluctuations such as pressure fluctuation and/or heat fluctuation. For example, the disturbance state environment is generated by the rotating disc in an optical floating level testing device. A certain method includes detecting difference between the optical path of a first beam 108 and the optical path of a second beam 110. One or more beams of the first beam and the second beam are stored in a shroud 114 near the disturbance state environment. In this method, further, a window 116 can be connected with the shroud near the disturbance state environment. For example, bad influences of the disturbance state environment are reduced. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2006317446(A) 申请公布日期 2006.11.24
申请号 JP20060130454 申请日期 2006.05.09
申请人 KLA TENCOR TECHNOLOGIES CORP 发明人 SAPPEY ROMAIN
分类号 G01B11/14 主分类号 G01B11/14
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