| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-destructive method for quantifying the hydrophilicity of porous material such as low dielectric constant (low-k) material having vacancies, and to provide a method for determining the depth of damage of the porous material. SOLUTION: A typical method includes a step of performing first polarimetry about the porous material using first adsorbate having a first wetting angle. This typical method further includes a step of performing second polarimetry about the porous material using second adsorbate having a second wetting angle, and the first and second wetting angles to the porous material are different from each other. The hydrophilicity of the porous material is determined at least partly based on the first and second adsorbates. COPYRIGHT: (C)2007,JPO&INPIT
|
