| 摘要 |
PROBLEM TO BE SOLVED: To provide a Fabry Perot filter capable of varying the substrate spacing at high speed, satisfying both of expansion of fluctuation width of substrate spacing and of minimization of variation unit, while maintaining high parallelism between optical substrates, and selecting to transmit the infrared ray of any desired wavelength. SOLUTION: In the filter including two facing substrates forming a reflective layer, the facing one-side of which is of translucency, where by moving one side of substrates due to operation of actuators to change the gap between the substrates, resulting in variation of transmissive or reflective spectrum properties, by sliding a movable substrate in an obliquely transverse direction to move, while conserving parallel to a fixed substrate, the spacing between the both substrates is controlled. By expanding a ratio of the distance in the obliquely transverse direction to the distance in the vertical direction, highly precise wavelength selection as was impossible conventionally becomes possible. COPYRIGHT: (C)2007,JPO&INPIT
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