| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card capable of bringing a probe to contact with an object to be tested in its over-drive state in which the load does not exceed a prescribed value. SOLUTION: A contact unit 2 is made up by attaching a metal plate 25 to a contact board 20 having a probe 21, and is hung from a main board 10 so as to be movable vertically by a flexible board 30. Therefore, when the contact unit 2 is raised by the object to be tested 40 being in contact with the probe 21, the probe 21 is applied practically with the weight of the contact unit. This load is kept constant even when the over-drive amount is varied, thereby preventing an excessive needle load from applying to the probe. COPYRIGHT: (C)2007,JPO&INPIT
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